AMAT
- Chamber Addition
- Remanufactured Tool
- Wafer Size Conversion
- Tool Relocation
- Second Source Materials
- Installation and Warranty
- Chamber/System Reconfiguration
- Upgrades
KLA Tencor、HITACHI
Bright Field Equipment
Dark Field Equipment
Non Pattern Inspection Equipment
Automated Optical Overlay
CD-Measurement SEM Equipment
Nikon（Stepper & Scanner）
System Modification
Nikon Stepper & Scanner System Improvement
(I line & KrF : 120nm ~ 300nm)
Lens performance improvement
– Lens aberration, Coma, Inclination, Distortion Piezo adjustment.
Illumination & Wafer Throughput improvement
– Illumination Intensity & uniformity improvement
– Illumination lens replacement & BMU adjustment.
Overlay improvement
– Alignment unit check & adjustment
– LSA, FIA Optic path check & adjustment
And More…..
サービス一覧
~ 300MM System Re-location
黄色：日本国内エンジニアでの対応です。 その他は、海外のエンジニアでの対応になります。